- ISBN-13 · 9780128177860
- ISBN-10 · 0128177861
- Publisher · Elsevier
- Format · Paperback, 1026 pages
- Published · 2020
- Language · English
Handbook of Silicon Based Mems Materials and Technologies
Rent this book
Free return shipping includedPlease Note: Rental books are typically used and do not come with any unused access code cards.
Buy from a seller
No copies for sale right now — but you can rent it above.
Check back soon — sellers list new copies every day.
About this book
Handbook of Silicon Based MEMS Materials and Technologies, Third Edition is a comprehensive guide to MEMS materials, technologies, and manufacturing with a particular emphasis on silicon as the most important starting material used in MEMS. The book explains the fundamentals, properties (mechanical, electrostatic, optical, etc.), materials selection, preparation, modeling, manufacturing, processing, system integration, measurement, and materials characterization techniques of MEMS structures.
The third edition of this book provides an important up-to-date overview of the current and emerging technologies in MEMS making it a key reference for MEMS professionals, engineers, and researchers alike, and at the same time an essential education material for undergraduate and graduate students.